Equipment that analyzes the defects in semiconductor and display during the process of production has been commercialized, and is expected to increase profitability.
The Korea Research Institute of Standards and Science (KRISS) revealed that real-time defect analysis equipment, PCDS, has recently been commercialized and supplied to one of the major companies in the display field.
PCDS was developed by Prof. Tae Sung KIM (School of Mechanical Engineering) and his research team, and KRISS led by Dr. Sang Woo KANG. The equipment is able to analyze in real-time, the size, shape, and contents of nano particles floating in the vacuum state. Because nano particles often contaminate a device and become a cause of defects, analysis is necessary.
In the past, nano particles were analyzed at the stage of completion because there was a limitation in using analyzing equipment in the vacuum state. If defects were found, all devices would be discarded. However, PCDS can now analyze nano particles even in the high vacuum state.
The Industry expects that business will expand to ￦50 billion won within the next 5 years.
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